XYR 3-Axis Stages

The PRECIBEO GO XYR stage moves loads of up to 10 kg with nanometer precision along the X- and Y-axis, as well as around the Z-axis.

All products in the modular PRECIBEO GO system are compatible and are easily combined into multi-axis systems offering Smooth Continuous Motion, Fast Step & Settling Times and that are Self-Locking at Rest.

Product Selection
Model Image
Travel (X,Y) mm
Travel θ (Z) °
Minimum Incremental Motion (X,Y) nm
Minimum Incremental Motion θ (Z) µrad
Repeatability (X,Y) nm
Repeatability θ (Z) µrad
Maximum Operating Force (Push/Pull) N
XYR-8N
± 10
± 10
2
< 0.1
± 200
± 15
(X) 10 / (Y) 8
XYRHV-8N
± 10
± 10
2
< 0.1
± 200
± 15
(X) 10 / (Y) 8
XYR-16N
± 10
± 10
2
< 0.1
± 200
± 15
(X) 20 / (Y) 16
XYRHV-16N
± 10
± 10
2
< 0.1
± 200
± 15
(X) 20 / (Y) 16

Product