OP400

Nanopositioning Piezo Objective Scanner

Optical sectioning producing 3D images

Autofocus systems for time-lapse imaging

High content screening

Surface analysis

Wafer inspection

Scanning interferometry

Description

Specifications

Documents and Drawings

Optional Accessories

Description

The NanoScan OP400 Nanopositioning Piezo objective scanner provides the fastest step and settle time of any objective positioner available. Incorporating capacitive feedback sensors, it also has market leading positioning accuracy and resolution. Compatible with most microscopes and objective lenses the system has user configurable settings optimized for different objective sizes, weights, and performance needs. The user simply selects the best setting for their application.

400 μm closed loop travel range ,480μm open loop range.Capacitive positioning sensors give sub nanometer positioning resolution and repeatability.Made from stainless steel providing greater mechanical stiffness (faster) and temperature stability (lowest drift).

The stage is a flexure guided system. The friction free flexures are designed to provide high stiffness and to minimize off axis motions giving high repeatability and faster cycle times.Suitable for upright and inverted applications.Connectors with built in stage calibration provide plug and play electronics which can be interchanged, minimizing system down times.Rapid settling times even with large objective loads. Tested to function for greater than 10 million full range cycles.

 

 

 

 

 

 

Specifications
Param/Model Range μm Repeatability nm Resolution nm Linearity % Load g Setting time ms
OP400
400 闭环
1.6
0.7
0.005
800
7 / 10 / 18 *

*5% Settle 0.5µm Step 150g/250g/500g Load。

Documents and Drawings

Product information

OP400-INSTALLATION-DRAWING

285.79KB

2026-01-13

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Software and secondary development

Nanobench 1.4.4.1

22.10MB

2026-10-08

Download
Nanobench 2.7.9API

39.05MB

2026-10-08

Download
Optional Accessories

Product